CN: DemoJournal-CN
ISSN: DemoJournal-ISSN
Research Article Archive • Versions 4 Vol 3 (3) : 20030301 2020
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Study of Inverse Lithography Approaches based on Deep Learning
Xianqiang Zheng, Xu Ma, Shengen Zhang, Yihua Pan, Gonzalo R. Arce
： 2020 - 09 - 21
： 2020 - 10 - 01
： 2020 - 10 - 07
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Journal of Microelectronic Manufacturing

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