TY  - JOUR
Lihong Liu; Thierry Engel; Huwen Ding; Yuanzhi Cui; Jing Zhang; Yayi Wei; Manuel FluryT1  - Influence of Parameters in the Design of a Faceted Structure for Incoherent Beam Shaping
JO  - Journal of Microelectronic Manufacturing
VL  - 4
Y1  - 2021/12/31
UR  - http://www.jommpublish.org/p/55/79/
L1  - http://www.jommpublish.org/jomm_data/publish/C7/2C/6A/9BE79F47ABA90BDEB3CD854717/10.33079.jomm.21040401.pdf
DO  - 10.33079/jomm.21040401
ER  -