TY  - JOUR
Pengpeng Yuan; Taian Fan; Yaobin Feng; Peng Xu; Yayi WeiT1  - Machine Learning based Optical Proximity Correction Techniques
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/12/30
UR  - http://www.jommpublish.org/p/55/67/
L1  - http://www.jommpublish.org/jomm_data/publish/A6/D1/0D/365B63451880A64E3E984F4AF9/10.33079.jomm.20030408.pdf
DO  - 10.33079/jomm.20030408
ER  -