TY  - JOUR
Boris A. Voinov; Patrick H. Keys; Stephen M. Cea; Ananth P. Kaushik; Mark A. StettlerT1  - Material Modeling in Semiconductor Process Applications
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/12/30
UR  - http://www.jommpublish.org/p/55/66/
L1  - http://www.jommpublish.org/jomm_data/publish/C9/F1/51/99504A4EEAB53D1CF75EBD506E/10.33079.jomm.20030406.pdf
DO  - 10.33079/jomm.20030406
ER  -