TY  - JOUR
Chenmin Hu; Khurram Zafar; Abhishek Vikram; Geoffrey YingT1  - Pattern-Centric Computational System for Logic and Memory Manufacturing and Process Technology Development
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/12/30
UR  - http://www.jommpublish.org/p/55/62/
L1  - http://www.jommpublish.org/jomm_data/publish/92/0E/5E/8DF4EE4EFF936ED5FE2D6313F4/10.33079.jomm.20030410.pdf
DO  - 10.33079/jomm.20030410
ER  -