TY  - JOUR
Bo Liu; Pengzheng Gao; Libin Zhang; Jiajin Zhang; Yuhong Zhao; Yayi WeiT1  - Recognition and Visualization of Lithography Defects based on Transfer Learning
JO  - Journal of Microelectronic Manufacturing
VL  - 3
Y1  - 2020/10/05
UR  - http://www.jommpublish.org/p/183/56/
L1  - http://www.jommpublish.org/jomm_data/publish/19/83/71/331F4A48A493363BD45F831B6C/10.33079.jomm.20030302.pdf
DO  - 10.33079/jomm.20030302
ER  -