@Article{jomm.21040401,
AUTHOR = {Lihong Liu; Thierry Engel; Huwen Ding; Yuanzhi Cui; Jing Zhang; Yayi Wei; Manuel Flury},
TITLE = {Influence of Parameters in the Design of a Faceted Structure for Incoherent Beam Shaping},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {4},
YEAR = {2021},
PAGES = {21040401},
URL = {http://www.jommpublish.org/p/55/79/},
DOI = {10.33079/jomm.21040401}
}