@Article{jomm.21040301,
AUTHOR = {Chang Xu},
TITLE = {A Novel R2R Control Strategy with Virtual Structure Deployment and Rolling Wave Control Plan},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {4},
YEAR = {2021},
PAGES = ,
URL = {http://www.jommpublish.org/p/55/77/},
DOI = {10.33079/jomm.21040301}
}