@Article{jomm.21040201,
AUTHOR = {Haibo Li; Qian Yang; Jia Sun; Jie Li; Meng Guo; Bing Li},
TITLE = {Improvement of Environment Stability of an i-Line Chemically Amplified Photoresist},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {4},
YEAR = {2021},
PAGES = {21040201},
URL = {http://www.jommpublish.org/p/55/73/},
DOI = {10.33079/jomm.21040201}
}