@Article{jomm.21040102,
AUTHOR = {Tao Zhou; Xuelong Shi; Chen Li; Yan Yan; Bowen Xu; Shoumian Chen; Yuhang Zhao; Wenzhan Zhou; Kan Zhou; Xuan Zeng},
TITLE = {Fast and Robust DCNN Based Lithography SEM Image Contour Extraction Models},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {4},
YEAR = {2021},
PAGES = {21040102},
URL = {http://www.jommpublish.org/p/183/70/},
DOI = {10.33079/jomm.21040102}
}