@Article{jomm.21040101,
AUTHOR = {Zhihao Wang; Xindi Yao; Huiwen An; Yake Wang; Jinping Chen; Shuangqing Wang; Xudong Guo; Tianjun Yu; Yi Zeng; Guoqiang Yang; Yi Li},
TITLE = {Recent Advances in Organic-inorganic Hybrid Photoresists},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {4},
YEAR = {2021},
PAGES = {21040101},
URL = {http://www.jommpublish.org/p/183/69/},
DOI = {10.33079/jomm.21040101}
}