@Article{jomm.20030408,
AUTHOR = {Pengpeng Yuan; Taian Fan; Yaobin Feng; Peng Xu; Yayi Wei},
TITLE = {Machine Learning based Optical Proximity Correction Techniques},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030408},
URL = {http://www.jommpublish.org/p/55/67/},
DOI = {10.33079/jomm.20030408}
}