@Article{jomm.20030406,
AUTHOR = {Boris A. Voinov; Patrick H. Keys; Stephen M. Cea; Ananth P. Kaushik; Mark A. Stettler},
TITLE = {Material Modeling in Semiconductor Process Applications},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030406},
URL = {http://www.jommpublish.org/p/55/66/},
DOI = {10.33079/jomm.20030406}
}