@Article{jomm.20030407,
AUTHOR = {Xuelong Shi; Yan Yan; Tao Zhou; Xueru Yu; Chen Li; Shoumian Chen; Yuhang Zhao},
TITLE = {Fast and Accurate Machine Learning Inverse Lithography Using Physics Based Feature Maps and Specially Designed DCNN},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030407},
URL = {http://www.jommpublish.org/p/55/63/},
DOI = {10.33079/jomm.20030407}
}