@Article{jomm.20030410,
AUTHOR = {Chenmin Hu; Khurram Zafar; Abhishek Vikram; Geoffrey Ying},
TITLE = {Pattern-Centric Computational System for Logic and Memory Manufacturing and Process Technology Development},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030410},
URL = {http://www.jommpublish.org/p/55/62/},
DOI = {10.33079/jomm.20030410}
}