@Article{jomm.20030304,
AUTHOR = {Litho World},
TITLE = {Recent Progress of the Integrated Circuit Industry in China ― Overview of the Manufacturing Industry},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030304},
URL = {http://www.jommpublish.org/p/183/58/},
DOI = {10.33079/jomm.20030304}
}