@Article{jomm.20030303,
AUTHOR = {Lei Qu; Chen Li; Jiang Yan; Rui Chen; Jing Zhang; Yanrong Wang; YaYi Wei},
TITLE = {Study on Simulation and Profile Prediction of Atomic Layer Deposition},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030303},
URL = {http://www.jommpublish.org/p/183/57/},
DOI = {10.33079/jomm.20030303}
}