@Article{jomm.20030302,
AUTHOR = {Bo Liu; Pengzheng Gao; Libin Zhang; Jiajin Zhang; Yuhong Zhao; Yayi Wei},
TITLE = {Recognition and Visualization of Lithography Defects based on Transfer Learning},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030302},
URL = {http://www.jommpublish.org/p/183/56/},
DOI = {10.33079/jomm.20030302}
}