@Article{jomm.20030102,
AUTHOR = {Wei Zhang; Jun Xu; Sicong Wang; Yi Zhou; Jian Mi},
TITLE = {Metrology Challenges in 3D NAND Flash Technical Development and Manufacturing},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {3},
YEAR = {2020},
PAGES = {20030102},
URL = {http://www.jommpublish.org/p/183/47/},
DOI = {10.33079/jomm.20030102}
}