@Article{jomm.19020407,
AUTHOR = {Xiaoye Ding; Sicong Wang; Yi Zhou; Yanzhong Ma; Le Yang; Chi Chen},
TITLE = {White Light Interference Solution for Novel 3D NAND VIA Dishing Metrology},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020407},
URL = {http://www.jommpublish.org/p/183/42/},
DOI = {10.33079/jomm.19020407}
}