@Article{jomm.19020408,
AUTHOR = {Qiang Wu; Yanli Li; Yushu Yang; Yuhang Zhao},
TITLE = {A Photolithography Process Design for 5 nm Logic Process Flow},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020408},
URL = {http://www.jommpublish.org/p/183/41/},
DOI = {10.33079/jomm.19020408}
}