@Article{jomm.19020105,
AUTHOR = {Lithotechsolutions.org},
TITLE = {Current Status of the Integrated Circuit Industry in China ― IC Special Equipment Industry},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {2},
YEAR = {2019},
PAGES = {19020105},
URL = {http://www.jommpublish.org/p/183/26/},
DOI = {10.33079/jomm.19020105}
}