@Article{jomm.18010204,
AUTHOR = {Mark Neisser},
TITLE = {The 2017 IRDS Lithography Roadmap},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010204},
URL = {http://www.jommpublish.org/p/183/20/},
DOI = {10.33079/jomm.18010204}
}