@Article{jomm.18010203,
AUTHOR = {Yijiang Shen; Zhenrong Zhang},
TITLE = {Variational Level-set Formulation for Lithographic Source and Mask Optimization},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010203},
URL = {http://www.jommpublish.org/p/183/19/},
DOI = {10.33079/jomm.18010203}
}