@Article{jomm.18010103,
AUTHOR = {Yansong Liu; Chao Zhao; Lisong Dong; Rui Chen; Yayi Wei},
TITLE = {A Novel High Volume Manufacturing Method for Defect-free and High-yield SiN Micro-sieve Membranes},
JOURNAL = {Journal of Microelectronic Manufacturing},
VOLUME = {1},
YEAR = {2018},
PAGES = {18010103},
URL = {http://www.jommpublish.org/p/183/15/},
DOI = {10.33079/jomm.18010103}
}